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Mass air flow sensing, Automotive mass air flow measurement for the air intake of combustion engines, General instrumentation, Industrial air flow, Medical
Engine and Vehicle, General Industry, Medical
Mass Air Flow Sensor Components are using sensitive fast thin film Nickel heaters on thin film silicon nitride membranes. This ensure high sensitivity and fast response. This technology is automotive proven. For the compensation of the ambient temperature the reference sensors are placed on the same chip made from the same thin film Nickel as the heaters. This mass air flow sensor on a hybrid ceramic is designed for unidirectional measurement using one heater on a membrane. The two reference sensors are placed on the chip frame to measure ambient temperature.
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