Description: Mass Air Flow Sensor Components are using sensitive fast thin film Nickel heaters on thin film silicon nitride membranes. This ensure high sensitivity and fast response. This technology is automotive proven. For the compensation of the ambient temperature the reference sensors are placed on the same chip made from the same thin film Nickel as the heaters. This mass air flow sensor on a hybrid ceramic is designed for unidirectional measurement using one heater on a membrane. The two reference sensors are placed on the chip frame to measure ambient temperature.

Features:

• Highly reliable and long term stability
• Fast reaction time
• Can be adapted to various flow channel geometries
• Can be used for almost all kinds of gases and volatile substances

Datasheets

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