Description: The MS7228-A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7228-A is suitable for mediaresistive applications.

Features:

• Media resistive pressure sensor die
• Typical output Span 150mV @ 5V
• Temperature range -40°C to +150°C
• Linearity 0.05% (typical)
• Die size 1.63 x 1.95mm²
• Low cost, high reliability

Datasheets

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