Description: The sensor element of the MS767 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS767-A_0.2) or 0.5 mm (MS767-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS767-D) and the other without Pyrex glass (MS767-S).

Features:
• 0 to 7 bar range (102 PSI)
• High sensitivity (392mV @ 5V)
• Absolute sensor
• Small Die size 1.62 x 1.48 mm
• High reliability, Low Cost

Datasheets

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