Micro Electro Mechanical Systems (MEMS)
Micro System Techniques (MST)
Micro Machining
Since 1988, Measurement Specialties has offered a wide range of products in planar microstructures for automotive, medical, household and industrial appliances. With services ranging from standard components to a complete solution for customer specific tasks, we can offer access to a whole range of micro system technologies.
Measurement Specialties’ Foundry Service charter is to identify customized products and to obtain and refine the competence of the technology. In this way, it is possible to develop and produce application specific products. The Foundry Service is based on our proven, standard MEMS technologies. Using our wafer technology with its micro-structured techniques, state-of-the-art equipment and production experience, Measurement Specialties can develop an individual solution for every customer.
Contact us for more information about our MEMS Foundry.
Applications
- Membranes
- Silicon Structures
- Waveguides
- Cavities
- Mirrors
- Heaters
- Electrodes
- Protective coatings
Benefits
- Individually developed and application-specific products
- Qualified processes
- Complete documentation
- High volume production
- Low cost
Key Features
- 4'' and 6'' wafer technology
- Professional process control & characterization
- ISO/TS conforming production
Technology Offered
Measurement Specialties offers its MEMS technology process for building functional elements or blocks on wafers up to 6" size as foundry service. The elements may consist of silicon/siliconoxinitride and metallic microstructures.
The functionality covers the whole range including:
- Mechanical (i.e., switches, actors, guidances)
- Electronic (thermo-, or magneto resistive bridges)
- Optical (waveguides, mirrors) applications
Therefore we are also able to do complete wafer-processes for complex customer specific MEMS chips, usually consisting of several functional elements.
Wafer technology comprises:
PVD (e-beam, sputtering)
Standard process materials: Ag, Au, Al, BiSb, Cr, CrSi, Cu, Fe, Ni, NiCr, NiFe, Pd, Pt, SiO2, SiON, Ta, TaN, Ti, TiW; others on request
PECVD: SiNx, SiOx
Lithography (b > 1µ)
Dry etching (IBE, RIBE, RIE)
Wet etching
Metallization
Mirrors
Optical filters
Heaters
Electrodes
Protection coatings
SiON-Microstructures
Membranes/thermic isolation
Actors
Guidances
Switches
Holder for transition-electron-microscopy
V-grooves for optical components
Waveguides
Cavities for Biomems
Gas sensors
Inspection and final testing
100% optical inspection eliminates:
- Surface failures
- Defects in structure geometry
- Passivation defects
- Small residues of metal on the surface
100% electrical inspection: Electrical test of special component features through the use of intelligent test chips
Technology Example—Mass Air Flow Sensors
The major foundry business at Measurement Specialties is the production of heat-flow sensors for the automotive industry. The sensor-chip contains metallic heaters and thermo resistors forming well-defined heat flow measuring units. To minimize the disturbing heat exchange with the surrounding material, both elements must be placed on a very thin silicon-nitride membrane.
Measurement Specialties fully manufactures heat-flow sensor wafers including ISO/TS characterization, testing and documentation. Many of our customers use our chips for mass flow-control and gas detection in a variety of automotive engines such as diesel and hydrogen.